Silicon dioxide passivation of InP/InGaAs metal-semiconductor-metal photodetectors
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- May 1996
- DOI:
- 10.1116/1.589215
- Bibcode:
- 1996JVSTB..14.1712K