Influence of Coulomb interactions on choice of magnification, aperture size, and source brightness in a two lens focused ion beam column
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- May 1996
- DOI:
- 10.1116/1.589203
- Bibcode:
- 1996JVSTB..14.1635K