Growth and electronic properties of epitaxial TiN thin films on 3C-SiC(001) and 6H-SiC(0001) substrates by reactive magnetron sputtering
Abstract
- Publication:
-
Journal of Materials Research
- Pub Date:
- October 1996
- DOI:
- 10.1557/JMR.1996.0309
- Bibcode:
- 1996JMatR..11.2458H