The role of excited species in ultraviolet-laser materials ablation III. Non-stationary ablation of organic polymers
Abstract
The role of non-stationary effects in nano-second ultraviolet (UV) excimer-laser ablation of organic polymers is discussed. The model includes reversible changes in absorption related to darkening and bleaching effects. Comparison of calculations and experimental data for polyimide demonstrates that the photophysical model describes the ablation kinetics quite well.
- Publication:
-
Applied Physics A: Materials Science & Processing
- Pub Date:
- May 1996
- DOI:
- 10.1007/BF01567110
- Bibcode:
- 1996ApPhA..62..397L
- Keywords:
-
- 82.65;
- 82.50;
- 42.10;
- PACS:&ensp