The adsorption of chlorobenzene on Si(111)7 × 7 at room temperature was studied by scanning tunneling microscopy (STM). Selective chemisorption was observed at different adatom sites. It was found that the center adatoms were more reactive than the corner adatoms, and the faulted half of the unit cell was more reactive than the unfaulted. The mechanism is discussed in terms of the electronic and atomic structures in Si(111)7 × 7. Both preferences indicate that chlorobenzene was present initially in a mobile precursor state.