FIB 601 focused ion beam fabrication of micron-sized apertures for the NASA AXAF x-ray telescope prelaunch calibration
Focused ion-beams have proved to be a superior means of fabricating holes between 5 and 20 microns in diameter, through gold and tungsten sheets over 40 microns thick. These holes are milled with an FEI FIB800 Focused Ion Beam Workstation using a Ga liquid metal source, with and without an enhancement gaseous etchant. They will be used as apertures for detectors that probe the point response function of the X-ray optics (Wolter Type-I mirror pairs), which form part of the NASA Advanced X-ray Astrophysical Facility. It is found that both pure milling and gas-assisted etching produced micron-sized holes of a quality superior to those produced by laser beam sputtering.