Experimental Verification of a New Mechanism for Dissociative Chemisorption: Atom Abstraction
Abstract
ion of a F atom from incident F2 by Si(100)- \(2×1\) is demonstrated by detection of the scattered, complementary F atom. He atom diffraction measurements are consistent with abstraction occurring at dangling bond sites. The low probability for single atom adsorption \(P1 = 0.10+/-0.01\) relative to the total adsorption probability \(Pt = 0.96+/-0.02\) in the zero coverage limit indicates that the second F atom can also be trapped by the dangling bonds. Both the single and two atom adsorption probabilities decay to zero when the dangling bonds are saturated at 1 ML coverage. Atom abstraction represents a mechanism distinct from the classic one for dissociative chemisorption.
- Publication:
-
Physical Review Letters
- Pub Date:
- March 1995
- DOI:
- 10.1103/PhysRevLett.74.2603
- Bibcode:
- 1995PhRvL..74.2603L