Master equation for atomic collision cascades with fixed path length between collisions
Abstract
A new kind of master equation for atomic collision cascades in a solid under ion bombardment is derived. The equation describes collision cascades with fixed path length between successive collisions. The new equation is used to calculate the ratio of sputtering yields of components for a model twocomponent system. Results of calculations are compared with the analytical theory of preferential sputtering, and with experimental data.
 Publication:

Nuclear Instruments and Methods in Physics Research B
 Pub Date:
 September 1995
 DOI:
 10.1016/0168583X(95)005692
 Bibcode:
 1995NIMPB.103...33S