The University at Albany ion scanning microprobe has been used for industrial applications. Several examples of such applications will be presented. Focused proton and helium ion beams of 1-2 μm dimensions have been used for the analysis. Rutherford backscattering spectrometry (RBS) and particle induced X-ray emission (PIXE) analysis have been performed on very large scale integrated circuits, thin film superconductors, small structures of high voltage cables and for several other industrial applications. Several examples of chemical and microstructural analysis will be presented.