Algorithms for numerical computation of aberration coefficients with an arbitrary optic axis
Abstract
A new algorithm for direct numerical computation of aberration coefficients characterizing the imaging properties of charged particle optical devices is presented. The algorithm is based on numerical integraton of a system of differential equations derived from the equations of motion for a single particle. The proposed algorithm is free from a priori assumptions about electrostatic/magnetostatic field symmetries and is useful in the calculation of aberration coefficients around an arbitrary optic axis. The algorithm is illustrated by a calculation of aberration coefficients for a simple electrostatic lens.
 Publication:

Nuclear Instruments and Methods in Physics Research A
 Pub Date:
 August 1995
 DOI:
 10.1016/01689002(95)002642
 Bibcode:
 1995NIMPA.363..295B