Roughness analysis of Si/SiGe heterostructures Feenstra, R. M. ; Lutz, M. A. ; Stern, Frank ; Ismail, K. ; Mooney, P. M. ; Legoues, F. K. ; Stanis, C. ; Chu, J. O. ; Meyerson, B. S. Abstract Publication: Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures Pub Date: July 1995 DOI: 10.1116/1.587865 Bibcode: 1995JVSTB..13.1608F