GaN patterned film synthesis: Carbon depletion by hydrogen atoms produced from NH3 activated by electron impact Hübner, A. ; Lucas, S. R. ; Partlow, W. D. ; Choyke, W. J. ; Schaefer, J. A. ; Yates, J. T., Jr. Abstract Publication: Journal of Vacuum Science Technology Pub Date: July 1995 Bibcode: 1995JVST...13.1831H