Ellipsometry for III-V epitaxial growth diagnostics Maracas, G. N. ; Kuo, C. H. ; Anand, S. ; Droopad, R. ; Sohie, G. R. L. ; Levola, T. Abstract Publication: Journal of Vacuum Science Technology Pub Date: May 1995 Bibcode: 1995JVST...13..727M