Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings
Abstract
A detailed review of the rigorous coupled-wave analysis (RCWA) was described and a step-by-step guide for its efficient and stable implementation was provided. A simple condense formulation for the efficient and stable numerical implementation of the RCWA for one-dimensional rectangular-groove binary surface-relief dielectric gratings was reported. Formulations for TE and TM polarization and for the conical-conical diffraction structure were included. Moreover, it was demonstrated that for dielectric gratings, even very deep gratings, the computed diffraction efficiencies always converged to the correct value as the number of space harmonics increased.
- Publication:
-
Journal of the Optical Society of America A
- Pub Date:
- May 1995
- DOI:
- 10.1364/JOSAA.12.001068
- Bibcode:
- 1995JOSAA..12.1068M
- Keywords:
-
- Boundary Value Problems;
- Gratings (Spectra);
- Harmonic Generations;
- Maxwell Equation;
- Numerical Analysis;
- Wave Diffraction;
- Convergence;
- Eigenvalues;
- Eigenvectors;
- Electric Fields;
- Magnetic Fields;
- Polarization (Waves);
- Optics