In Situ Growth and Characterization of La0.8Sr0.2CoO3 Perovskite Mixed Conductor Films
Abstract
We have grown thin films of La(0.8)Sr(0.2)CoO3 on SrTiO3 (100), MgO (100), yttrium-stabilized zirconia YSZ (100), and CeO2 (100)/Al2O3 substrates by using a 90 deg off-axis RF magnetron sputtering deposition. X-ray diffraction analysis reveals that, depending on substrate, the deposited films grew either epitaxially or highly textured. Scanning tunneling microscopy reveals that the thin films grow with a smooth surface and with different growth mechanisms according to substrate. For La(0.8)Sr(0.2)CoO3 thin films grown on MgO (100), the low values of the channeling minimum yield from Rutherford backscattering spectroscopy indicated excellent epitaxy with the substrate.
- Publication:
-
Journal of the Electrochemical Society
- Pub Date:
- May 1995
- DOI:
- 10.1149/1.2048643
- Bibcode:
- 1995JElS..142.1702B
- Keywords:
-
- Characterization;
- Cobalt Oxides;
- In Situ Measurement;
- Lanthanum Oxides;
- Perovskites;
- Strontium Oxides;
- Superconducting Films;
- Superconductors (Materials);
- Thin Films;
- Backscattering;
- Magnetron Sputtering;
- Radio Frequencies;
- Scanning Tunneling Microscopy;
- Spectroscopy;
- X Ray Diffraction;
- Zirconium Oxides;
- Electronics and Electrical Engineering