Periodical nanostructure fabrication using electron interference fringes produced by scanning interference electron microscope
Abstract
A scanning interference electron microscope (SIEM) has been developed for periodical nanostructure fabrication. This system can produce electron interference fringes with a period from 2 nm to several tens of micrometers. Fabrications of periodical nanostructures with 23 to 170 nm periods have been demonstrated by transferring the electron interference fringe onto the semiconductor surfaces.
- Publication:
-
Applied Physics Letters
- Pub Date:
- May 1995
- DOI:
- 10.1063/1.113698
- Bibcode:
- 1995ApPhL..66.2754F