Setup for materials analysis with heavy ion beams at the Munich MP tandem
Abstract
A system has been installed for thin film analysis with two different techniques: Rutherford backscattering spectrometry (RBS) and elastic recoil detection analysis (ERDA). The mass resolution of heavy ion RBS is demonstrated on multilayers of YBaCuO using 30 MeV 16O beams. The essential component of the ERDA system is an ionization detector with 7.5 msr solid angle and particle as well as position resolution. Depth resolution better than 10 nm and sensitivity below {10 14 at }/{cm 2} could be achieved in ERDA of Al/Cu multilayers with 200 MeV Au ion beams. Angular resolution is sufficient to see blocking patterns of recoils from a Si single crystal.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- March 1994
- DOI:
- 10.1016/0168-583X(94)95911-0
- Bibcode:
- 1994NIMPB..85..726A