Deposition of molybdenum carbonitride thin films from Mo(NBut)2(NHBut)2 Chiu, Hsin-Tien ; Ho, Wen-Yu ; Chuang, Shiow-Huey Abstract Publication: Journal of Materials Research Pub Date: July 1994 DOI: 10.1557/JMR.1994.1622 Bibcode: 1994JMatR...9.1622C