Native-oxide defined ring contact for low threshold vertical-cavity lasers
Abstract
Data are presented characterizing a new process for fabrication of vertical-cavity surface-emitting lasers based on the selective conversion of high Al composition epitaxial AlGaAs to a stable native oxide using ``wet oxidation.'' The native oxide is used to form a ring contact to the laser active region. The resulting laser active regions have dimensions of 8, 4, and 2 μm. The lowest threshold laser is achieved with the 8-μm active region, with a minimum threshold current of 225-μA continuous wave at room temperature.
- Publication:
-
Applied Physics Letters
- Pub Date:
- July 1994
- DOI:
- 10.1063/1.113087
- Bibcode:
- 1994ApPhL..65...97H