Profilometry by phase-shifted Talbot images
Abstract
- Publication:
-
Applied Optics
- Pub Date:
- December 1994
- DOI:
- 10.1364/AO.33.007955
- Bibcode:
- 1994ApOpt..33.7955V
- Keywords:
-
- METROLOGY;
- OPTICAL INSTRUMENTS;
- OPTICAL MEASUREMENTS