Laser lithography by photon scanning tunneling microscopy
Abstract
We have investigated the possibility of using a photon scanning tunneling microscope (PSTM) for laser lithography. A contrast enhancement material (CEM) is coated onto a sample slide and coupled to the prism of a PSTM. The CEM becomes transparent above a laser (HeCd at a wavelength of 442 nm) intensity threshold attained due to the proximity of the probe tip. The same surface can then be inspected using the given experimental configuration by replacing the HeCd laser line with a non-exposing 633-nm HeNe laser line. Direct patterns can be produced by varying the exposure time and the shape of the probe tip.
- Publication:
-
Presented at the 2nd International Conference on Laser Ablation: Mechanisms and Applications
- Pub Date:
- 1993
- Bibcode:
- 1993laab.confQ..19L
- Keywords:
-
- Electron Microscopes;
- Electron Tunneling;
- Helium-Neon Lasers;
- Laser Applications;
- Lithography;
- Photons;
- Scanning Tunneling Microscopy;
- Coatings;
- Image Processing;
- Printing;
- Prisms;
- Transparence;
- Lasers and Masers