Crystallographic phase identification in the scanning electron microscope: Backscattered electron Kikuchi patterns
Abstract
Use of charge coupled device-based detector for acquisition of high-quality backscattered electron Kikuchi patterns (BEKP) allows on-line crystallographic phase identification in the SEM. Phase identification through combined BEKP and energy dispersive x-ray spectrometry is demonstrated using Ru oxide thin films on Si, which were identified as tetragonal RuO(sub 2).
- Publication:
-
Presented at the Annual Meeting of the Electron Microscopy Society of America
- Pub Date:
- 1993
- Bibcode:
- 1993ems..meetQ...1M
- Keywords:
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- Backscattering;
- Charge Coupled Devices;
- Crystallography;
- Scanning Electron Microscopy;
- Solid Phases;
- Crystals;
- On-Line Systems;
- Oxide Films;
- Oxides;
- Ruthenium Compounds;
- Thin Films;
- X Ray Spectroscopy;
- Solid-State Physics