This paper describes a new field-vacuum microelectronics or vacuum integrated circuits (VIC). Its principle, the structure of the field emission microtriodes and microfabrication techniques and processing are given in detail. The processing for the thin field emission cathodes is also reviewed. The application of VIC and the related problems for its future development are discussed.
NASA STI/Recon Technical Report N
- Pub Date:
- April 1993
- Integrated Circuits;
- Field Emission;
- Electronics and Electrical Engineering