Limits of low-energy electron optics Hordon, Laurence S. ; Huang, Zhirong ; Maluf, Nadim ; Browning, Ray ; Pease, R. Fabian W. Abstract Publication: Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures Pub Date: November 1993 DOI: 10.1116/1.586894 Bibcode: 1993JVSTB..11.2299H