Reactive Ion Etching of Lead Zirconate Titanate (PZT) Thin Film Capacitors Vijay, Dilip P. ; Desu, Seshu B. ; Pan, W. Abstract Publication: Journal of the Electrochemical Society Pub Date: September 1993 DOI: 10.1149/1.2220876 Bibcode: 1993JElS..140.2635V