Chemical vapor deposition tungsten via plug process development with polyimide interlevel dielectric in a multilevel metal system
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- September 1992
- DOI:
- 10.1116/1.586200
- Bibcode:
- 1992JVSTB..10.2277C