Ultraviolet ozone oxidation of Si surface studied by photoemission and surface infrared spectroscopy Niwano, Michio ; Suemitsu, Maki ; Ishibashi, Yutaka ; Takeda, Yuki ; Miyamoto, Nobuo ; Honma, Koji Abstract Publication: Journal of Vacuum Science Technology Pub Date: September 1992 Bibcode: 1992JVST...10.3171N