Resonant sensors for high accuracy pressure measurement using silicon technology

A resonant element transducer has been developed for aerospace applications using micromachined silicon technology. The sensor is a beam supported over a square diaphragm. The resonant frequency of the beam is proportional to the applied pressure on the diaphragm. The sensor is the subject of a continuing development program; results presented show that the prototypes performance rivals that of current high accuracy pressure transducers.