Microstructural studies by TEM of diamond films grown by combustion flame
Abstract
Microstructures of diamond films grown in an oxygen-acetylene combustion flame were studied by TEM. The O2/C2H2 gas ratio was fixed and the substrate materials and temperature were varied. High quality diamond films were grown by this method at high growth rates of about 30 micron/hr. A rough surface and high density of secondary nucleation sites and microtwins were observed in the diamond grains grown on molybdenum (Mo) at a substrate temperature of 500 C. When the substrate temperature wass raised to between 500 and 870 C, the defect density was greatly reduced, revealing a low density of stacking faults and dislocations. Diamond films grown on Si substrates did not show the same substrate temperature dependence on defect density, at least not over the same temperature range. However, the same correlation between defect density, secondary nucleation, and surface morphology was observed.
- Publication:
-
New Diamond Science and Technology
- Pub Date:
- 1991
- Bibcode:
- 1991mrs..conf..587M
- Keywords:
-
- Crystal Growth;
- Diamond Films;
- Fuel-Air Ratio;
- Microstructure;
- Oxyacetylene;
- Surface Roughness;
- Transmission Electron Microscopy;
- Electron Microscopy;
- Gas Mixtures;
- Hydrocarbons;
- Nucleation;
- Surface Temperature;
- Solid-State Physics