High-frequency resonant accelerator with frequency tuning for ion implantation
Abstract
- Publication:
-
Pisma v Zhurnal Tekhnischeskoi Fiziki
- Pub Date:
- June 1991
- Bibcode:
- 1991PZhTF..17...80G
- Keywords:
-
- Gas-Ion Interactions;
- Heavy Ions;
- Ion Implantation;
- Multimode Resonators;
- Particle Acceleration;
- Equations Of Motion;
- Ion Beams;
- Ion Motion;
- Linear Accelerators;
- Magnetic Resonance;
- Plasma Physics