Submicron STIM tomography reconstruction techniques
Abstract
One-dimensional projections of ion energy loss have been converted to areal density using tabulated stopping powers in a scanning transmission ion microscopy (STIM) reconstruction of a test object, displaying a spatial resolution of 0.37 μm. Location and registration of the centre of areal mass density in each projection provides a means of overcoming (a) the misalignment of the specimen rotation axis with the centre of the scan path and (b) deviations of the specimen from its precession around the axis of rotation. Multiplicative algebraic reconstruction technique (ART), filtered backprojection and maximum-entropy algorithms for the reconstruction of the object are considered. Maximum entropy is shown to produce an image with the least number of artifacts. However, when time considerations are taken into account, it is found that filtered backprojection is the preferred algorithm for a tomographic reconstruction.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- March 1991
- DOI:
- 10.1016/0168-583X(91)95542-L
- Bibcode:
- 1991NIMPB..54..390B