BiSrCaCuO Thin Film Grown on SrTiO3 Substrate with Off-Oriented (110) Surface
Abstract
A Bi2(Sr, Ca)3Cu2Ox thin film with the (117) orientation was formed on a slightly off-oriented (110) SrTiO3 substrate by single-target sputtering. The (110) substrate off-oriented by 5° is considered to have limited film growth in one direction. From RHEED and cross-sectional TEM observations, it was found that the c-axis of the film tilts against the substrate surface by 46-47° and the SrTiO3(110) plane by 41-42°. Also, the surface morphology observed by SEM has been much improved.
- Publication:
-
Japanese Journal of Applied Physics
- Pub Date:
- April 1991
- DOI:
- 10.1143/JJAP.30.L582
- Bibcode:
- 1991JaJAP..30L.582K
- Keywords:
-
- Copper Oxides;
- High Temperature Superconductors;
- Sputtering;
- Strontium Titanates;
- Superconducting Films;
- Thin Films;
- Bismuth Oxides;
- Calcium Oxides;
- Crystal Growth;
- Crystal Structure;
- Strontium Compounds;
- Substrates;
- Solid-State Physics