Josephson LSI fabrication technology using NbN/MgO/NbN tunnel junctions Aoyagi, M. ; Nakagawa, H. ; Kurosawa, I. ; Takada, S. Abstract Publication: IEEE Transactions on Magnetics Pub Date: March 1991 DOI: 10.1109/20.133887 Bibcode: 1991ITM....27.3180A