Preparation of thin film high temperature superconductors
Abstract
Fundamental issues in preparing high-quality high-Tc YBa2Cu3O(7-x) thin films are addressed. The techniques of inverted cylindrical magnetron sputtering and pulsed laser deposition are chosen as successful examples to illustrate how the key problems can be solved. The fabrication of YBa2Cu3O(7-x)/ PrBa2Cu3O(7-x) superlattices where superconductivity in a single unit cell layer of YBa2Cu3O(7-x) was observed demonstrates the state of the art of thin-film deposition of high-Tc materials. Systematic variations of the deposition parameters result in changes of superconducting and structural properties of the films that correlate with their microwave and infrared characteristics.
- Publication:
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IEEE Transactions on Magnetics
- Pub Date:
- March 1991
- DOI:
- Bibcode:
- 1991ITM....27..982X
- Keywords:
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- Crystal Structure;
- High Temperature Superconductors;
- Microwave Equipment;
- Superconducting Films;
- Thin Films;
- Yttrium Oxides;
- Barium Oxides;
- Copper Oxides;
- Mixed Oxides;
- Superlattices;
- Solid-State Physics