Single source metalorganic chemical vapor deposition of low microwave surface resistance YBa2Cu3O7
Abstract
YBa2Cu3O7 films 2000-7500 Å thick were deposited onto [100] LaAlO3 substrates using a novel single source metalorganic chemical vapor deposition technique. We have so far observed critical currents as high as 4×106 A/cm2 at 77 K, transition temperatures (Tc at R=0) as high as 91 K, and the 10 GHz microwave surface resistance Rs as low as 40 μΩ at 4.2 K and 400 μΩ at 77 K.
- Publication:
-
Applied Physics Letters
- Pub Date:
- July 1991
- DOI:
- 10.1063/1.105400
- Bibcode:
- 1991ApPhL..59..606H
- Keywords:
-
- Electrical Properties;
- High Temperature Superconductors;
- Metalorganic Chemical Vapor Deposition;
- Microwave Frequencies;
- Superconducting Films;
- Thin Films;
- Yttrium Oxides;
- Aluminum Oxides;
- Copper Oxides;
- Electrical Resistance;
- Electrical Resistivity;
- Lanthanum Oxides;
- Mixed Oxides;
- Surface Properties;
- Transition Temperature;
- Solid-State Physics