Schottky-barrier image sensor with 100% fill factor
Abstract
A new concept, the Direct Schottky Injection (DSI), is described for a three-dimensional construction of infrared imagers with a continuous Schottky-barrier-detector surface on one side of a thinned (10 to 25 microns) silicon substrate and p-type buried-channel CCD readout structure on the other side. The DSI structure provides a 100-percent fill factor, a large charge-handling capacity, and a high-density pixel design. The construction and operation are described for DSI imagers with frame-transfer CCD (FT-CCD) and interline-transfer CCD(IT-CCD) readout. The operation of the IT-CCD DSI imager was demonstrated with a 128 x 128 focal plane array (FPA) with 50 x 50-micron pixels.
- Publication:
-
Infrared Detectors and Focal Plane Arrays
- Pub Date:
- September 1990
- DOI:
- 10.1117/12.21717
- Bibcode:
- 1990SPIE.1308...70K
- Keywords:
-
- Barrier Layers;
- Focal Plane Devices;
- Image Reconstruction;
- Infrared Imagery;
- Schottky Diodes;
- Barritt Diodes;
- Carrier Injection;
- Holes (Electron Deficiencies);
- P-Type Semiconductors;
- Instrumentation and Photography