Error Analysis For Anisotropic Compensator Defects For Null Ellipsometry

For null ellipsometry, error equations for polarizer and analyzer angles are formulated in terms of the anisotropic defect parameters of the compensator. Errors of δ ψ and δ Δ for dielectric samples are about the same as those for the straight-through case. Explicit analytical solutions of 8v and So for metallic samples are derived in terms of the anisotropic retardations with large deviations from quarter-wave. The analytical solutions agree with the results obtained from the direct computer simulation of the null ellipsometer as well as with the numerical solutions for the error equations.