a High Resolution Study of Silicon, Phosphorus, Sulfur, Chlorine, and Argon Lmm Auger Electrons Produced by 0.4 to 2.0 Mev Proton Bombardment

Gaseous targets of SiH_4, PH_3, SO_2, CH_3Cl, and Ar have been bombarded by 0.4 to 2.0 MeV protons to produce LMM Auger yields of Si, P, S, Cl and Ar at 0.45 eV resolution. The LMM Auger electrons were then transmitted in a constant energy mode and detected by means of a spherical spectrometer positioned at an angle of 90^circ to the primary proton beam direction. From the measured Auger yields, the L-shell ionization cross sections for the elements Si, P, S, Cl, and Ar have been obtained. The L-shell ionization cross sections obtained thereby are compared to existing experimental L-shell ionization cross sections and also to various theoretical predictions. Also, the LMM Auger spectra in gaseous SiH _4, SO_2, CH _3Cl and Ar excited by 1.4 MeV H _2^+ ion bombardment and for PH _3 under 0.7 MeV H_2^+ ion bombardment at 0.3 eV resolution have been measured. With the exception of SO_2, all the other spectra have been decomposed into several lines using Gaussian curve-fitting methods. The measured line energies, line widths, and line intensities in the various spectra are presented. The line energies in the SiH_4^ectrum measured are compared to experimental energies obtained elsewhere and with existing theoretical predictions. Also for PH_3 and CH_3Cl, the line energies measured are compared to calculated Auger energies using a simple model approach. Possible final Auger transitions have been assigned.