The composition of fluid inclusions in host minerals holds much information about the chemical environment of mineral formation. When solid inclusions are exposed through polishing, their content can readily be investigated with an electron or proton probe. However, with an electron probe, only the daughter minerals or the residue material left when a fluid inclusion is opened can be analyzed since electrons with energies of tens of keV cannot penetrate to the unexposed inclusion. On the other hand, proton beams of a few MeV can penetrate a few tens of μm of material and still be able to excite characteristic radiation. This phenomenon has been exploited for the analysis of subsurface inclusions. Ideally, standard petrographie sections are polished so that inclusions, targetted for analysis, are brought to within 10 μm of the surface. The overlying matrix reduces the sensitivity of PIXE for the elements of low Z such as Na and Al because of the attenuation of the X-rays. However, these elements, as well as elements of even lower Z, which cannot be analyzed with the electron probe, can readily be detected with PIGE at good sensitivity.