Ion Bombardment Enhanced Etching for Bi-Ca-Sr-Cu-O High-Tc Superconducting Thin Films
Abstract
Ion bombardment enhanced etching (IBEE) has been first applied to Bi-Ca-Sr-Cu-O (BCSCO) high-Tc superconducting thin films. It was found out that the damaged region formed by the ion irradiation with a 200 keV Si++ focused ion beam was selectively dissolved in 1 normal KOH solution. The IBEE process resolves 0.1 μm patterns in the BCSCO films. Other strong alkaline solutions such as NaOH solution were also effective for the selective etching of the BCSCO films, but acid solutions did not give an enhanced etch rate at the irradiated region. The KOH treatment gave no effect on Tc of the BCSCO film. Bridge structures with the width of 1.5 μm were successfully fabricated with little degradation in Tc.
- Publication:
-
Japanese Journal of Applied Physics
- Pub Date:
- October 1990
- DOI:
- 10.1143/JJAP.29.2307
- Bibcode:
- 1990JaJAP..29.2307F
- Keywords:
-
- Bismuth Oxides;
- Etching;
- High Temperature Superconductors;
- Ion Beams;
- Ion Impact;
- Superconducting Films;
- Thin Films;
- Alkalies;
- Calcium Oxides;
- Copper Oxides;
- Electrical Resistance;
- Mixed Oxides;
- Solutions;
- Strontium Compounds;
- Solid-State Physics