A facilities view of the low volume, high product mix fab

Automation has been widely recognized as the next major step in semiconductor manufacturing and numerous manufacturers around the world have been spending large sums of money to develop integrated automation systems for microelectronic chip production. Automation is a manufacturing tool that can be used in many facilities both new and existing, but the power and effectiveness of any automation project can be enhanced by a facility that is designed to be automated. This paper is heavily based on experiences gained in the design, construction, and startup of Sandia's newest cleanroom known as the Microelectronics Development Laboratory (MDL). The MDL is a Class 1 facility of individual process bays organized around a central hallway. Chase areas separate the process bays, and whenever possible, equipment is mounted through the walls to allow maintenance to be done in the less clean chase areas.