Structure of amorphous silicon alloy films

The understanding was improved at the microscopic level of amorphous silicon-germanium-alloy films deposited under various conditions to assist researchers to produce higher quality films. The method was a joint theoretical and experimental approach to the correlation of NMR, ESR, and other characterizations, especially relating to rearrangements of hydrogen. Deuteron magnetic resonance reveals the presence of (and changes in) tightly bonded hydrogen (deuterium), weakly bonded hydrogen, molecular hydrogen, and rotating silyl groups. Microvoids are investigated via observation of para D2 for which Delta M sub J transitions are frozen out. Solid echoes reveal HD and ortho D2 trapped as singles in the semiconductor matrix. Theoretical calculations show dangling bonds to be more likely than floating bonds.