Preparation of Gd-Ba-Cu-O Superconducting Thin Films on Silicon Substrates by Magnetron Sputtering
Abstract
Thin superconducting film of Gd-Ba-Cu-O have been prepared on silicon substrates by magnetron sputtering from single target of sintered GdBa2Cu3O7-x in an oxygen-argon atmosphere. The films were deposited at substrate temperatures between 740 and 770°C. In situ heat treatment at 400°C in pure O2 atmosphere appears the orthorombic phase with the full superconducting transition at 84 K.
- Publication:
-
Modern Physics Letters B
- Pub Date:
- 1989
- DOI:
- 10.1142/S0217984989000078
- Bibcode:
- 1989MPLB....3...37K