Embedded growth of gallium arsenide in silicon recesses for a coplanar GaAs on Si technology
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- January 1989
- DOI:
- 10.1116/1.584433
- Bibcode:
- 1989JVSTB...7..116L