Chemical vapor deposition of the superconductor YBa2Cu3O(7-x)(s) from the gas phase
Abstract
The deposition of the condensed phase YBa2Cu3O(7-x) from a gas mixture composed of YCl3, BaCl2, Cu3Cl3, and Ar reacting with another consisting of O2 and Ar in a flow system at elevated temperatures was investigated by means of the virtual equilibrium model, and the deposition rates were computed as a function of input gas stream compositions. The optimum growth conditions were identified.
- Publication:
-
Journal of Superconductivity
- Pub Date:
- September 1989
- DOI:
- Bibcode:
- 1989JSup....2..395R
- Keywords:
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- High Temperature Superconductors;
- Mixed Oxides;
- Superconducting Films;
- Vapor Deposition;
- Vapor Phases;
- Yttrium Oxides;
- Barium Oxides;
- Copper Oxides;
- Gas Mixtures;
- Phase Transformations;
- Substrates;
- Solid-State Physics