Dynamics of liquid-encapsulated czochralski growth of gallium arsenide: Comparing model with experiment
Abstract
The dynamic thermal-capillary model developed previously [Derby, Atherton, Thomas and Brown, J. Sci. Computing 2 (1987) 297] is extended to model a low-pressure, liquid-encapsulated Czochralski system for growth of GaAs in an axial magnetic field that is strong enough that convective heat transport is unimportant. The model includes thermal conduction in all phases, a model for semi-transparent radiation through the B2O3 encapsulant and diffuse-gray radiation between the crystal, crucible and melt. Numerical simulations of seeding and growth are compared directly to experimental growth using a Hamco CG-800 puller modified for GaAs growth and equipped with a superconducting magnet capable of producing an axial magnetic field of up to 5 kG. The crystal shape predicted by the simulations is in semiquantitative agreement with the experiment. The calculations also predict optimum operating strategies for producing constant-diameter crystals, including the transients associated with seeding and shouldering the crystal.
- Publication:
-
Journal of Crystal Growth
- Pub Date:
- May 1989
- DOI:
- 10.1016/0022-0248(89)90284-4
- Bibcode:
- 1989JCrGr..96..135T
- Keywords:
-
- Czochralski Method;
- Encapsulating;
- Gallium Arsenides;
- Melts (Crystal Growth);
- Digital Simulation;
- Heat Transfer;
- Low Pressure;
- Magnetic Field Configurations;
- Solid-State Physics