Characterization of semiconductor materials by Raman microprobe
Abstract
The physical background of semiconductor characterization by Raman scattering and some of the technical problems in the Raman microprobe are described. Several significant applications for semiconductors in bulk, thin film, and device configurations are presented.
- Publication:
-
IEEE Journal of Quantum Electronics
- Pub Date:
- May 1989
- DOI:
- 10.1109/3.27987
- Bibcode:
- 1989IJQE...25..965N
- Keywords:
-
- Ion Implantation;
- Laser Applications;
- Microanalysis;
- Raman Spectra;
- Raman Spectroscopy;
- Semiconductors (Materials);
- Thin Films;
- Carrier Mobility;
- Continuous Wave Lasers;
- Coupled Modes;
- Crystal Structure;
- Doped Crystals;
- Solid-State Physics