A metal-alloy process for the formation of oxide superconducting films - Advantages, problems, substrate interactions, buffer layers
Abstract
A method for preparing high-Tc oxide superconducting films is presented in which a metal-alloy precursor film is first deposited by magnetron sputtering in an oxygen-free environment. The film is then heated in O2 in two stages, a preannealing oxidation followed by a final firing which forms the superconducting film. Thin Y overlayers were used to overcome the potential problem of ambient moisture attacking the highly reactive metallic alloy. Favorable combinations of substrates and protective buffer layers such as ZrO2/Ag and MgO/Nb have been identified.
- Publication:
-
High-Temperature Superconductors
- Pub Date:
- 1988
- Bibcode:
- 1988mrs..proc..297G
- Keywords:
-
- High Temperature Superconductors;
- Magnetron Sputtering;
- Mixed Oxides;
- Superconducting Films;
- Thin Films;
- Copper Oxides;
- Crystal Growth;
- Solid-State Physics