Applications of Elastic Recoil Detection Analysis (erda) to Surface Studies.

The technique of Elastic Recoil Detection Analysis (ERDA) and its applications to surface light molecule composition and coverage analysis are presented. The basic principle of ERDA is the combination of high energy ion recoil technique and DeltaE-E ion identification method with compatibility to UHV system. After reviewing the recent development of ERDA to light trace element concentration and depth profile analysis, the principle and technical details of ERDA to surface analysis are described. The sensitivity and the reliability of ERDA for surface analysis is demonstrated by the studies of the temperature dependence adsorptions of ethylene on Ni(100) and ethylene and acetylene on Pt(111). The results reveal a new direction of applications of this already versatile technique.