Coulomb interactions in particle beams
Abstract
The theory of particle interactions in low and medium density, nonrelativistic, timeindependent beams of identical particles, in probe forming instruments is discussed. Low and medium density and nonrelativistic refer to beam currents typically much smaller than 1 mA and beam voltages typically between 1 and 100 keV. Timeindependent implies that the flow of particles is assumed to be constant. The theory is developed for electronbeam lithography pattern generators and scanning electron microscopes. It should be applicable to focused ion beam tools as well. The analytical models used are based on the ideas of Van Leeuwen and Jansen (1983). This work is extended and confronted with other theories and the results of numerical Monte Carlo simulation. The impact of particle interactions on beams in drift space is stressed. Results of an analysis to extend the model to beams in an external uniform acceleration field are presented.
 Publication:

Ph.D. Thesis
 Pub Date:
 1988
 Bibcode:
 1988PhDT........11J
 Keywords:

 Beam Currents;
 Coulomb Collisions;
 Electron Beams;
 Particle Interactions;
 Drift Rate;
 Electron Microscopy;
 Ion Beams;
 Lithography;
 Monte Carlo Method;
 Scanning;
 Time Dependence;
 Nuclear and HighEnergy Physics